5 edition of Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing found in the catalog.
Published
1997
by Electrochemical Society in Pennington, NJ
.
Written in English
Edition Notes
Statement | editors, M. Meyyappan, D.J. Economou, S.W. Butler ; [sponsored by] Dielectric Science and Technology and Electronics Divisions. |
Genre | Congresses. |
Series | Proceedings ; v. 97-9, Proceedings (Electrochemical Society) ;, v. 97-9. |
Contributions | Meyyappan, M., Economou, D. J. 1958-, Butler, S. W. 1963-, Electrochemical Society. Dielectric Science and Technology Division., Electrochemical Society. Electronics Division., Electrochemical Society. Meeting. |
Classifications | |
---|---|
LC Classifications | TK7871.85 .I58347 1997 |
The Physical Object | |
Pagination | ix, 347 p. : |
Number of Pages | 347 |
ID Numbers | |
Open Library | OL303555M |
ISBN 10 | 1566771366 |
LC Control Number | 97211633 |
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