Last edited by Tujas
Tuesday, July 28, 2020 | History

5 edition of Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing found in the catalog.

Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

by International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing (2nd 1997 MontreМЃal, QueМЃbec)

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  • 34 Currently reading

Published by Electrochemical Society in Pennington, NJ .
Written in English

    Subjects:
  • Semiconductors -- Design and construction -- Congresses.,
  • Process control -- Congresses.,
  • Semiconductor industry -- Production control -- Congresses.

  • Edition Notes

    Statementeditors, M. Meyyappan, D.J. Economou, S.W. Butler ; [sponsored by] Dielectric Science and Technology and Electronics Divisions.
    GenreCongresses.
    SeriesProceedings ; v. 97-9, Proceedings (Electrochemical Society) ;, v. 97-9.
    ContributionsMeyyappan, M., Economou, D. J. 1958-, Butler, S. W. 1963-, Electrochemical Society. Dielectric Science and Technology Division., Electrochemical Society. Electronics Division., Electrochemical Society. Meeting.
    Classifications
    LC ClassificationsTK7871.85 .I58347 1997
    The Physical Object
    Paginationix, 347 p. :
    Number of Pages347
    ID Numbers
    Open LibraryOL303555M
    ISBN 101566771366
    LC Control Number97211633


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Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing by International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing (2nd 1997 MontreМЃal, QueМЃbec) Download PDF EPUB FB2