Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

by International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing (2nd 1997 MontreМЃal, QueМЃbec)

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Published 1997 by Electrochemical Society in Pennington, NJ .
Written in English

Subjects:

• Semiconductors -- Design and construction -- Congresses.,
• Process control -- Congresses.,
• Semiconductor industry -- Production control -- Congresses.

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Edition Notes

Statement	editors, M. Meyyappan, D.J. Economou, S.W. Butler ; [sponsored by] Dielectric Science and Technology and Electronics Divisions.
Genre	Congresses.
Series	Proceedings ; v. 97-9, Proceedings (Electrochemical Society) ;, v. 97-9.
Contributions	Meyyappan, M., Economou, D. J. 1958-, Butler, S. W. 1963-, Electrochemical Society. Dielectric Science and Technology Division., Electrochemical Society. Electronics Division., Electrochemical Society. Meeting.
Classifications
LC Classifications	TK7871.85 .I58347 1997
The Physical Object
Pagination	ix, 347 p. :
Number of Pages	347
ID Numbers
Open Library	OL303555M
ISBN 10	1566771366
LC Control Number	97211633

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